QPM60 - Interactive TFT Process Monitor

As alternative to PC based monitor, EDF offers rack mounted monitor. The QPM60 mutli channel thin film monitor is used to measure rate and thickness in thin film deposition processes. The touch screen display allows for intuitive operation and provides time charts for detailed process control.

Two sensor inputs are standard and four additional sensor inputs are optional with all of them featuring high resolution measurement of 0.01 Hz and up to 10 Hz sampling rate. Six analog outputs allow rate and thickness recording or can be assigned to control manual power with any deposition units.

Sensor inputs can be assigned to different materials, configured for dual sensors or averaged using individual weights. Four relay outputs allow the QPM60 to control source or sensor shutters, trigger time and thickness setpoints, and signal crystal failure. Digital inputs allow external signals to start/ stop the layer and zero readings.

Enclosure Dimensions [mm]: 520 x 286 x 550 – 2Ustandard
Weight: 3.5 kg
User Interface: 4.3” Colour TFT and rotary encoder
Communication interface: RS232 and EthernetIP
Inputs channels: 2 BNC in standard ( 4 and 6 – option )*
Resolution: 0.01Hz / channel
Thickness: 0.012 A ( density = 1)
Hardware interface: D/A and RS232 interface fully compatible to SQM160:
6 programmable analogue outputs for rate,
4 digital inputs (5V); 4 relay outputs
thickness recording or power control ( via 4 x programmable BNC outputs )
Electrical: 95 - 240 VAC, 50-60Hz, 45VA
Standard compliances: CE, RoHS

*each channel requires externa oscillator model QM20-EO