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Cleaning, activation and polymerization - low pressure plasma system

The Henniker Plasma 'NEBULA' range of low pressure plasma treatment systems are standalone systems with large capacity chambers for treating larger format parts, or more parts in a single batch. They are suited to both regular industrial usage and also for development of new processes and surface chemistry. NEBULA plasma treatment systems have a large HMI interface and are controlled via an industrial PLC system. They allow user level access ranging from simple operator, able to execute programs only, to full administrator, able to create users, edit and test new recipes. Due to their flexibility and robustness, they are chosen where reliability and flexibility are paramount.

Each NEBULA system can be configured with a variety of options including horizontal and vertical sample loading and also a rotary drum for treating many small parts or even powders. The user can specify up to three gas inlets as well as a precise monomer dosing inlet for plasma polymerisation work. In this way, simple cleaning and activation tasks can be extended to produce permanent polymeric coatings on many surfaces.

Henniker Plasma's NEBULA range of low pressure plasma treatment systems are perfect for cleaning, activation, and deposition onto a wide range of materials. Key applications include surface preparation to improve bond adhesion and plasma polymerisation to produce hydrophilic or hydrophobic coatings.

NEBULA BASE MODEL
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NEBULA OPTIONS
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Enclosure dimensions W 612mm x H 1875mm x L 852mm (+200mm on side for cables) W 612mm x H 1875mm x L 852mm (+200mm on side for cables)
Weight ~100-120kg depending on model ~100-120kg depending on model
Chamber material Stainless Steel Stainless Steel
Chamber form Rectangular Rectangular
Chamber dimensions

30L (300x300x365mm),

50L (300x300x560mm),

100L (400x400x625mm),

150L (400x600x625mm)

30L (300x300x365mm),

50L (300x300x560mm),

100L (400x400x625mm),

150L (400x600x625mm)

Removable parts carrier material Aluminium/Stainless Steel Aluminium/Stainless Steel
Removable parts carrier form Flat horizontal trays, vertical carriers, rotary drum Flat horizontal trays, vertical carriers, rotary drum
Power 0-1000W, continuously variable output 0-1000W, continuously variable output
Frequency 40kHz 40kHz
Interface 15” Colour TFT, Windows10, PLC control Unlimited steps/recipes with user access privileges
Gas channels 1 - 3 Digital Mass Flow Controllers vapour dosing inlet
Vent inlet x1 soft ventilation option
Purge inlet x1 x1
Connections 6mm compression ¼” compression
Pressure gauge Pirani sensor Pirani sensor
Vacuum pump 2-stage rotary* others to suit application, e.g. dry pump
Electrical 380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz 380-400 VAC/3~/N/PE, max. current 16A/phase, 50Hz
Power cord Suited to region Suited to region
Compliance CE – ROHS - WEEE CE – ROHS - WEEE

*Suitable for use with air, oxygen and other non-corrosive gases