QPM60-2C - Thin film thickness and rate monitor
2 Channel Thin Film Monitor
QPM60-2C Thin film thickness and rate monitor
Overview
The QPM60 multi channel thin film monitor is used to measure rate and thickness in thin film deposition processes. The touch screen display allows for intuitive operation and provides time charts for detailed process control.
High Resolution and Precision
Two sensor inputs are standard and four additional sensor inputs are optional. All sensor inputs feature high resolution measurement of 0.01 Hz at up to a 10 Hz sampling rate.
Advanced Stability and Control
Six analog outputs allow for rate and thickness recording, or they can be assigned to manually control power with any deposition units.
Sensor inputs can be assigned to different materials, configured for dual sensors, or averaged using individual weights. Four relay outputs allow the QPM60 to control source or sensor shutters, trigger time and thickness setpoints, and signal crystal failure. Digital inputs allow external signals to start and stop the layer, as well as zero readings.
Key Features:
High-Resolution Measurement
Achieve exceptional precision in thin film deposition with high-resolution measurements of 0.01 Hz at sampling rates up to 10 Hz, perfectly tracking both rate and thickness.
Scalable Sensor Capabilities
Highly adaptable to your process needs. The unit comes standard with two high-resolution sensor inputs, with the option to expand up to six channels. Sensors can be assigned to different materials, configured for dual setups, or averaged.
Intuitive Touch Interface
Features a vibrant 4.3" touch screen graphical display for effortless operation. It provides real-time, detailed rate, thickness, and power versus time charts for comprehensive visual process control.
Advanced Process Automation
Equipped with four relay outputs to control source or sensor shutters, trigger time and thickness setpoints, and signal crystal failures. Four digital inputs (5V) allow external signals to seamlessly start, stop, or zero readings.
Versatile Output & Power Control
Six programmable analog outputs provide maximum flexibility. They can be utilized for precise rate and thickness recording or assigned to manually control power across any deposition units.
Seamless Connectivity & Integration
Designed for modern integration with RS232 and Ethernet interfaces. It supports direct connection to one QM20-transducer and QM20-PoE units (via external switch), and features a convenient front panel USB port for data storage and firmware upgrades.
Technical Specifications:
Frequency Resolution | 0.01 Hz at 10 readings/s |
Measurement Interval | 0.1s to 2s (adjustable in 0.1s step) |
Quartz oscillator type | 6 MHz |
Reference frequency stability | 0.5 ppm |
Sensor inputs | 2 |
External sensor inputs | 1 inputs RS232/RS485 (up to 3 devices working with RS485 interface) |
Input type | female BNC |
Protocol | Compatible with INFICON SQM160 ASCII Protocol |
Thickness and Rate Resolution/Measurement | ±0.012 A @ tooling/density/z-ratio = 100/1/1, fundamen- tal frequency = 6 MHz, 0.1s measurement interval |
Digital inputs | 4 |
Functions | User-selected |
Input rating | 0-5 V, non-isolated, active low (0 volts) |
Relay outputs | 4 |
Functions | User-selected see chapter 4.3.9 |
Relay rating | 30 V(rms) or 30 V (dc), 2 A maximum |
Analogue outputs | 4 |
Functions | Frequency, rate, thickness |
Output rating | 0-10 V |
Mains Power Supply | 100 to 240V (ac), ±10% nominal, 50/60 Hz, autodetect |
Power Consumption | 45 W |
Fuse | 250 V, 500 mA, Type T, 5 x 20 mm, time lag |
Installation (Overvoltage) | Class 1 Equipment (grounded type) |
Usage | Use indoors only |
Storage temperature | -20...50°C |
Operation temperature | 15...40°C |
Relative humidity | 0 to 80 % RH non-condensing. Ordinary protection (not protected against harmful ingress of moisture) |
Altitude | Up to 2000 meters |
Pollution Degree | 2 (per EN 61010) |
Warm Up Period | None required. For maximum stability allow 5 minutes |
Case Dimensions H x W x D | 88 x 252.6 x 264 mm |
Weight | 1.7 kg |
Stored Films | 99 |
Density | 0.50 to 99.99 g/cm3 |
Tooling | 10 to 399% |
Acoustic impedance | 0.10 to 10.00 |
Final Thickness | 0.000 to 9999 kÅ |
Time Setpoint | 0:00 to 99:59 mm:ss |
Sample/Hold. | 0 to 5999 s |
Sensor Average | 1 to 6, depending on sensors installed |