QPM60-6C - Thin film thickness and rate controller
6 Channel Thin Film Monitor
QPM60 - Quartz
Process Monitor
The QPM60 multi channel thin film monitor is used to measure rate and thickness in thin film deposition processes. The touch screen display allows for intuitive operation and provides time charts for detailed process control.
Six sensor input channel are available and feature a high resolution measurement of 0.01 Hz at up to 10 Hz sampling rate.
Stability and control
Six analog outputs allow rate and thickness recording or can be assigned to control manual power with any deposition units. Sensor inputs can be assigned to different materials, configured for dual sensors or averaged using individual weights. Four relay outputs allow the QPM60 to control source or sensor shutters, trigger time and thickness setpoints, and signal crystal failure. Digital inputs allow external signals to start/stop the layer and zero readings.
Specification:
QCM Sensor Inputs | 6 |
Frequency Range | 4 - 6.5 MHz |
Frequency Resolution | 0.01 Hz * |
Frequency Stability | ± 2 ppm total, over 0o to 50oC |
Selectable Measurement Period | 0.10 to 2 sec (in .05 sec increments) |
Measurement Filter | 1 to 20 readings with alpha-filter |
Stored Films | 99 |
Analog Outputs | 6 outputs (0 to 10 VDC), rate & thickness, power |
Digital Inputs/Outputs | 4 inputs (5V), 8 relay outputs |
Communication Interface | External: RS232 + Ethernet** |
Front Panel Operation | 4.3” touch screen display with rotary encoder |
Power | 100-240 VAC, 50/60 Hz, 20 W |
CE Compliance | Class 1 equipment, 73/72/EEC LVD, 89/336/EEC ECD |
Housing/Mounting | 1/2-rack cabinet, 3-1/2” high, |
Weight [kg] | 3.0 |
Windows Software (included) | Provides remote setup and operation, datalogging functions; operates also with SQM160 software |
* each channel requires external oscillator model QM20-EO
** Ethernet for future firmware development
Features:
- 2 high resolution measurements channels; optional up to 6 channels
- 4.3” touch screen graphical display
- Rate/thickness/power vs. time charts*1
- 6 programmable analog outputs for rate/thickness recording or power control
- 4 digital inputs (5V); 4 relay outputs
- D/A and RS232 interface compatibility to QM20
- User interface: RS232 and Ethernet
- Front panel USB port for storage and firmware upgrade
- Supports one QM20-transducer
- (USB/RS485) directly and QM20-PoE units via external PoE-switch*1