PPS 1000D Magnetron Power Supply
Overview
The PPS 1000D is a versatile dual source power supply for R&D coating & cleaning applications of 1000 W max power with accuracy of 1 mA, V and W only. It is excellent power source for low power R&D application. It can control up to two sources which can be any combination of compact magnetron sputter heads or glow discharge heads. Sputter sources can be positioned on separate chambers even. The efficient glow discharge head used together with air as the process gas gives excellent plasma/ion cleaning of substrates and other critical parts such as TEM grids. With the glow discharge, hydrocarbons or biological material can also be etched.
Key Features:
Dual Output
Two high-voltage outputs providing the ability to support one or two independent magnetrons without the need to use external switch.
Stability & Safety
DC operating mode featuring fast response arc detection/suppression and highly stable power operation starting from just 1 W (depending on cable length).
Maximum Performance
Switched control methods (I, V, P) designed to ensure maximum performance, efficiency, and precise operational control during processes.
High Compatibility
High acceptance output impedance that guarantees seamless operation and the flexibility to work with magnetrons of various sizes and specifications.
Accessibility & Control
A user-friendly, transparent interface equipped with an OLED display, intuitive keypad, rotary encoder, and desk light identification parameters.
Process Management
A built-in timer for precise tracking of operation time, making it easier to monitor and automate technological processes.
Technical Specifications:
Input Supply Voltage | 215 to 250 VAC (43 .... 63 Hz), 1 phase operation * |
Input Current | Max 8 A; Power factor = 0.87 |
Mode of operation | DC |
Output Voltage | 0 – 1000 VDC negative (ignition voltage 1200 V) |
Output Current | 0 – 2000 mA (1 mA step) |
Output Power | 0 - 1000 W max in DC mode |
Regulation Mode | Power, Voltage or Current mode |
Output Protection | Input over voltage, input under voltage, input over current, phase lost |
Ripple Noise | Switching: 2% p-p (50 kHz) Line: 1% p-p (100/120 Hz) |
Ramp Up time | Programable |
Communication | ModBus RTU/TCP |
Interface | RS232/RS485, Ethernet TCP**, Analog I/O** |
Methods of control | Local or remote through Communication Interface |
Arc Detection | < 2 us Response Time |
Dimensions | 483 x 395 x 88 mm (W x D x H) - 2U Rack Mounting Standard |
Weight | 10.6 kg |
Analog Interface | 25 Dsub male connector isolated (up to 2000 V RMS, 0 - 5V Analogue, 0/24 VDC Digital) |
Serial Communication Options | RS232 or RS485 with ModBUS EDF’s protocol ***; Ethernet IP, with ModBUS TSP EDF’s protocol |
** additional options
*** configurable with order