PPS 300RC
The PPS 300C series 2‐in‐1 unit integrates RF Power Generator and Matching Box into one case with a compact structure, small size, and easy installation.
With a stable and reliable signal source and power amplifier control module, the incident and reflected power can be accurately measured, and the output power can be precisely controlled. It is widely used in applications such as vacuum plasma generators and thin film deposition
Specification:
Mains | Single phase 220VAC +/-10%, 50Hz/60Hz |
Output Frequency | 13.56 MHz/27.12MHz/40.68MHz for option; DIN 7/16 HF male connector type |
Output Power Range | 5W - 300W |
Rated Power | 300 W |
Max Reflected Power | 60 W |
Efficiency | > 60% (Z=50 Ohm, Rated Output) |
Harmonic | < -50 dBc |
Spurious | < -50 dBc |
Pulse operation Mode | 100Hz... 30kHz/100Hz step; Duty cycle: 1...99% |
Power Stability | 1.0% of set point or 0.1% of full rated power, whichever is greater |
Amplifire Overheating | Auto shutdown when Amplifier overheating |
Reflected Power exceeds limit | Limit output power when the reflected power exceeds the set threshold |
External Interlock | Auto shutdown when external lock fails |
ARC protection | Auto shutdown when arc detected |
Cooling Medium | Air |
Dimensions [mm] | 435 * 483 * 132 |
Reflected Power | < 1% |
Matching method | manual/automatic |
Matching time | < 2s |
Features:
- RF Power Generator+Matching Box in one case, compact structure, easy ship and install
- Full digital process, matching with high precision and in short time
- Lage output power margin, capable of long‐term stable operation
- Precise measurement for output power, reflected power and load impedance
- Support automatic gain control (AGC), output power accurate control
- Supports local control, IO control and remote control with RS48 5 and RJ45 ports
- Support continuously adjust output power from the minimum to the maximum rate
with advanced power amplifier technology - Support arc and standing wave protection, quick respond to protect equipment safety
in case of abnormalities - Support overload, overcurrent and overheat protection