PPS 600RC RF Plasma Power Supply + Matching Box
Overview
The PPS 300RC series 2‐in‐1 unit integrates RF Power Generator and Matching Box into one case with a compact structure, small size, and easy installation.
With a stable and reliable signal source and power amplifier control module, the incident and reflected power can be accurately measured, and the output power can be precisely controlled. It is widely used in applications such as vacuum plasma generators and thin film deposition
Key Features:
Integrated 2-in-1 Design
Features a compact structure that integrates the RF Power Generator and Matching Box into a single case, making shipping and installation remarkably easy while saving valuable space.
High-Precision Digital Matching
Powered by a fully digital process that ensures high-precision matching in a very short time. It supports Automatic Gain Control (AGC) for highly accurate output power regulation.
Exceptional Power Stability
Engineered with advanced power amplifier technology, it boasts a large output power margin capable of long-term, stable operation. It supports continuous output power adjustment from minimum to maximum rates.
Advanced Measurement Capabilities
Equipped with a reliable signal source and control module to accurately measure and monitor incident power, reflected power, and load impedance in real-time.
Comprehensive Control Interfaces
Offers highly flexible operation modes to suit any setup, fully supporting local control, IO control, and remote control via built-in RS485 and RJ45 ports.
Ultimate Equipment Protection
Built-in, quick-response safety mechanisms protect against abnormalities, including arc and standing wave protection.
Technical Specifications:
Mains | Single phase 220 VAC ± 10%, 50 Hz/60 Hz |
Output Frequency | 13.56 MHz/27.12 MHz*/40.68 MHz* DIN 7/16 HF male connector type |
Output Power Range | 10W - 300 W |
Rated Power | 600 W |
Max Reflected Power | 120 W |
Efficiency | > 60% (Z=50 Ohm, Rated Output) |
Harmonic | < -50 dBc |
Spurious | < -50 dBc |
Pulse operation Mode | 100 Hz - 30 kHz, (100 Hz step); Duty cycle: 1 - 99% |
Power Stability | 1.0% of set point or 0.1% of full rated power, whichever is greater |
DC source over voltage protection | Auto shutdown when DC voltage exceed limit |
DC source over current protection | Auto shutdown when DC current exceed limit |
DC source over heating protection | Auto shutdown when DC temperature exceed limit |
Amplifier Overheating | Auto shutdown when Amplifier overheating |
Reflected Power exceeds limit | Limit output power when the reflected power exceeds the set threshold |
External interlock | Auto shutdown when the external lock fails |
ARC protection | Auto shutdown when arc detected |
Cooling Medium | Air |
Dimensions | 435 x 483 x 132 mm (D x W x H) |
Reflected Power | < 1% |
Matching method | manual/automatic |
Matching time | < 2s |
* selected during purchase