QM20 Quartz Monitor Dual channel Quartz Crystal Oscillator
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Overview: QPM60 - Quartz Process Monitor
The QPM60 mutli channel thin film monitor is used to measure rate and thickness in thin film deposition processes. The touch screen display allows for intuitive operation and provides time charts for detailed process control.
Two sensor inputs are standard and four additional sensor inputs are optional with all of them featuring high resolution measurement of 0.01 Hz at up to 10 Hz sampling rate.
Stability and control
Six analog outputs allow rate and thickness recording or can be assigned to control manual power with any deposition units.
Sensor inputs can be assigned to different materials, configured for dual sensors or averaged using individual weights. Four relay outputs allow the QPM60 to control source or sensor shutters, trigger time and thickness setpoints, and signal crystal failure. Digital inputs allow external signals to start/stop the layer and zero readings.
Features and benefits
- 2 high resolution measurements channels; optional up to 6 channels
- 4.3" touch screen graphical display
- Rate/thickness/power vs. time charts*1
- 6 programmable analog outputs for rate/thickness recording or power control
- 4 digital inputs (5V); 4 relay outputs
- D/A and RS232 interface compatibility to QM20
- User interface: RS232 and Ethernet
- Front panel USB port for storage and firmware upgrade
- Supports one QM20-transducer (USB/RS485) directly and QM20-PoE units via external PoE-switch*1
Technical Specifications
Documentation
User manuals and product datasheets will be available here.
Overview: QPM60 - Quartz Process Monitor
The QPM60 mutli channel thin film monitor is used to measure rate and thickness in thin film deposition processes. The touch screen display allows for intuitive operation and provides time charts for detailed process control.
Two sensor inputs are standard and four additional sensor inputs are optional with all of them featuring high resolution measurement of 0.01 Hz at up to 10 Hz sampling rate.
Stability and control
Six analog outputs allow rate and thickness recording or can be assigned to control manual power with any deposition units.
Sensor inputs can be assigned to different materials, configured for dual sensors or averaged using individual weights. Four relay outputs allow the QPM60 to control source or sensor shutters, trigger time and thickness setpoints, and signal crystal failure. Digital inputs allow external signals to start/stop the layer and zero readings.
Features and benefits
- 2 high resolution measurements channels; optional up to 6 channels
- 4.3" touch screen graphical display
- Rate/thickness/power vs. time charts*1
- 6 programmable analog outputs for rate/thickness recording or power control
- 4 digital inputs (5V); 4 relay outputs
- D/A and RS232 interface compatibility to QM20
- User interface: RS232 and Ethernet
- Front panel USB port for storage and firmware upgrade
- Supports one QM20-transducer (USB/RS485) directly and QM20-PoE units via external PoE-switch*1
Technical Specifications
Documentation
User manuals and product datasheets will be available here.