QPM60 Quartz Process Monitor
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The QPM60 mutli channel thin film monitor is used to measure rate and thickness in thin film deposition processes . The touch screen display allows for intuitive operation and provides time charts for detailed process control .
Two sensor inputs are standard and four additional sensor inputs are optional with all of them featuring high resolution measurement of 0.01 Hz at up to 10 Hz sampling rate .
Six analog outputs allow rate and thickness recording or can be assigned to control manual power with any deposition units .
Sensor inputs can be assigned to different materials, configured for dual sensors or averaged using individual weights . Four relay outputs allow the QPM60 to control source or sensor shutters, trigger time and thickness setpoints, and signal crystal failure . Digital inputs allow external signals to start/stop the layer and zero readings .
- 2 high resolution measurements channels; optional up to 6 channels
- 4.3” touch screen graphical display
- Rate/thickness/power vs. time charts*1
- 6 programmable analog outputs for rate/thickness recording or power control
- 4 digital inputs (5V); 4 relay outputs
- D/A and RS232 interface compatibility to QM20
- User interface: RS232 and Ethernet
- Front panel USB port for storage and firmware upgrade
- Supports one QM20-transducer (USB/RS485) directly and QM20-PoE units via external PoE-switch*1
| Specifications | |
| QCM Sensor Inputs | Standard 2; optional: 4 or 6 utilizing passive external oscillators |
| Frequency Range | 4- 6.5 MHz |
| Frequency Resolution | ± 0.01 Hz at 10 reading/sec |
| Frequency Stability | ± 2 ppm total, over 0° to 50°C |
| Selectable Measurement Period | 0.10 to 2 sec (in .05 sec increments) |
| Measurement Filter | 1 to 20 readings with alpha-filter |
| Stored Films | 99 |
| Analog Outputs | 6 outputs (0 to 10 VDC), rate & thickness, power |
| Digital Inputs/Outputs | 4 inputs (5V), 8 relay outputs |
| Serial Interfaces | External: RS232 + Ethernet QMB6 Transducer: QMB6-U or QMB6-4; QMB6-PoE via external PoE |
| Front Panel Operation | 4.3” touch screen display with rotary encoder |
| Power | 100-240 VAC, 50/60 Hz, 20 W |
| CE Compliance | Class 1 equipment, 73/72/EEC LVD, 89/336/EEC ECD |
| Housing/Mounting | 1/2-rack cabinet, 3-1/2” high, |
| Weight | 3.0 Kg |
| Windows Software (included) | Provides remote setup and operation, datalogging functions; operates also with SQM160 software |
| Ordering information | |
| QPM60 | QPM60 with 2 input channels |
| QPM60-4C | QPM60 with 4 input channels |
| QPM60-6C | QPM60 with 6 input channels |
| QPM60-REXT | QPM60 full rack mount extension |
| QPM60-QM20 | Passive external oscillator incl. 6” BNC cable |
| QPM60-QM20-CBL10 | Passive external oscillator incl. 6” and 10’ BNC cables |
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The QPM60 mutli channel thin film monitor is used to measure rate and thickness in thin film deposition processes . The touch screen display allows for intuitive operation and provides time charts for detailed process control .
Two sensor inputs are standard and four additional sensor inputs are optional with all of them featuring high resolution measurement of 0.01 Hz at up to 10 Hz sampling rate .
Six analog outputs allow rate and thickness recording or can be assigned to control manual power with any deposition units .
Sensor inputs can be assigned to different materials, configured for dual sensors or averaged using individual weights . Four relay outputs allow the QPM60 to control source or sensor shutters, trigger time and thickness setpoints, and signal crystal failure . Digital inputs allow external signals to start/stop the layer and zero readings .
- 2 high resolution measurements channels; optional up to 6 channels
- 4.3” touch screen graphical display
- Rate/thickness/power vs. time charts*1
- 6 programmable analog outputs for rate/thickness recording or power control
- 4 digital inputs (5V); 4 relay outputs
- D/A and RS232 interface compatibility to QM20
- User interface: RS232 and Ethernet
- Front panel USB port for storage and firmware upgrade
- Supports one QM20-transducer (USB/RS485) directly and QM20-PoE units via external PoE-switch*1
| Specifications | |
| QCM Sensor Inputs | Standard 2; optional: 4 or 6 utilizing passive external oscillators |
| Frequency Range | 4- 6.5 MHz |
| Frequency Resolution | ± 0.01 Hz at 10 reading/sec |
| Frequency Stability | ± 2 ppm total, over 0° to 50°C |
| Selectable Measurement Period | 0.10 to 2 sec (in .05 sec increments) |
| Measurement Filter | 1 to 20 readings with alpha-filter |
| Stored Films | 99 |
| Analog Outputs | 6 outputs (0 to 10 VDC), rate & thickness, power |
| Digital Inputs/Outputs | 4 inputs (5V), 8 relay outputs |
| Serial Interfaces | External: RS232 + Ethernet QMB6 Transducer: QMB6-U or QMB6-4; QMB6-PoE via external PoE |
| Front Panel Operation | 4.3” touch screen display with rotary encoder |
| Power | 100-240 VAC, 50/60 Hz, 20 W |
| CE Compliance | Class 1 equipment, 73/72/EEC LVD, 89/336/EEC ECD |
| Housing/Mounting | 1/2-rack cabinet, 3-1/2” high, |
| Weight | 3.0 Kg |
| Windows Software (included) | Provides remote setup and operation, datalogging functions; operates also with SQM160 software |
| Ordering information | |
| QPM60 | QPM60 with 2 input channels |
| QPM60-4C | QPM60 with 4 input channels |
| QPM60-6C | QPM60 with 6 input channels |
| QPM60-REXT | QPM60 full rack mount extension |
| QPM60-QM20 | Passive external oscillator incl. 6” BNC cable |
| QPM60-QM20-CBL10 | Passive external oscillator incl. 6” and 10’ BNC cables |
Download detailed technical documentation and product specifications. Access to documentation is available after submitting your email address.
Download product specification
Enter your email to receive the technical datasheet.
By submitting this form, you agree to our Privacy Policy.