PulseDC series

 

The PPS Pulse DC Magnetron Power Supplies are versatile dual source power supply combining DC and unipolar PulseDC operating modes available for R&D coating & cleaning applications. It can control up to two sources which can be any combination of compact magnetron sputter heads or glow discharge heads. Sputter sources can be positioned on separate chambers even. 

PPS1500U-120PPS1500U-300
Output Power

1500W in DC mode, 1500W in Pulse Mode

1500W in DC mode, 1500W in Pulse Mode

Output Voltage

1000V (1200V injection peak)

1000V (1200V injection peak)

Output Current

3000 mA

3000 mA

Mode of operation

DC and Unipolar PulseDC

DC and Unipolar PulseDC

Frequency of operation

10kHz - 120kHz

10kHz - 300kHz

Communication  interface

Modbus RTU RS232 or RS485 

Analog I/O, Modbus TCP EthernetIP*

Modbus RTU RS232 or RS485 

Analog I/O, Modbus TCP EthernetIP* 

* additional options