PulseDC series

 

The PPS Pulse DC Magnetron Power Supplies are versatile dual source power supply combining DC and unipolar PulseDC operating modes available for R&D coating & cleaning applications. It can control up to two sources which can be any combination of compact magnetron sputter heads or glow discharge heads. Sputter sources can be positioned on separate chambers even. 


PPS1500U-120

PPS1500U-300

Output Power

1500W in DC mode, 1050W in Pulse Mode

1500W in DC mode, 1050W in Pulse Mode

Output Voltage

1000V

1000V

Output Current

3A

3A

Mode of operation

DC and Unipolar PulseDC

DC and Unipolar PulseDC

Frequency    
of operation

10kHz - 120kHz

10kHz - 300kHz

Communication interface

RS232 / RS485 

I/O, EthernetIP*

RS232 / RS485 

I/O, EthernetIP*

* additional options