QPM60-4C - Thin film thickness and rate controller
4 Channel Thin Film Monitor
QPM60-4C
Enclosure Dimensions [mm] | 520 x 286 x 550 – 2U standard |
Weight [netto] | 1.6 kg |
User Interface | 4.3” Colour TFT and rotary encoder |
Communication interface | RS232 and EthernetIP * |
Inputs channels | 4 |
Resolution | 0.01 Hz ** |
Thickness resolution | 0.012 A ( density = 1) |
Hardware interfaces | D/A and RS232 interface fully compatible to SQM160: 6 programmable analogue outputs for rate, 4 digital inputs (5V); 4 relay outputs thickness recording or power control ( via 4 x programmable BNC outputs ) |
* Ethernet for future firmware development
** each channel requires external oscillator model QM20-EO
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