PPS 1500U-300 Magnetron Power Supply
| Voltage: 1000 V |
PPS 1500U-300 Magnetron Power Supply
Overview
The PPS 1500U-300 is a versatile dual source power supply combining DC and PulseDC operating modes available for R&D coating & cleaning applications. Unit is available with frequency range of 120 kHz. It can control up to two sources which may be any combination of compact magnetron sputter heads or glow discharge heads. Sputter sources can even be positioned in separate chambers. The PPS 1500U is only 2U height and also features a vacuum gauge interlock. It can be used as a standalone table-top device or rack mounted.
Low-Ripple Noise Technology
Low-Ripple Noise Technology, the elimination of high-voltage transistor switching using resonant converter technology and current-diversion circuits, results in superior reliability as well as excellent process performance in the form of high output-voltage consistency. Arc Detection and Suppression are guaranteed by fast response loop in less than 2 us.
Stability and Control
Extremely stable output allows for operating the sources even at powers less than 2W, which makes this device unique in its own class and in comparison, to competitor offerings. It is ideal for R&D applications!
Key Features:
Dual-Mode & Dual-Source Operation
Versatile DC and PulseDC operating modes in a single unit. Features two high-voltage outputs for seamless dual-magnetron operation without the need for an external switch box.
Advanced Low-Ripple & Arc Suppression
Utilizes resonant converter technology to eliminate high-voltage transistor switching, ensuring high output-voltage consistency. Fast-response loop guarantees arc detection and suppression in less than 2µs.
Unmatched Low-Power Stability
Engineered for superior control with extremely stable output even at powers as low as 2W. This unique capability makes it the ideal power supply for sensitive R&D applications.
Broad Magnetron Compatibility
Accommodates a large impedance range, allowing it to seamlessly drive magnetrons of different sizes—ideal for 2", 3", and larger sputter heads, even when positioned in separate chambers.
Intuitive Control & Automation
A user-friendly interface featuring an LCD display, keyboard, and rotary encoder. Includes selectable voltage, current, and power regulation modes, a clear LED power indicator, and built-in timer mode operation.
Compact Design & Ultimate Protection
A space-saving 2U high-power-density design that functions as a tabletop device or rack-mounted unit. Equipped with a vacuum gauge interlock, self-diagnosis, and comprehensive overtemperature, short-circuit, and overvoltage protections.
Applications:
- Displays & Touch Interfaces: Oxide TFT LCD & Colour filters, standard TFT LCDs, OLED LTPS sputter metal & TCO deposition, and ITO deposition for touch panels.
- Semiconductors & Data: Precision semiconductor wafer sputtering, data storage components, and FCCL (Flexible Copper Clad Laminate) production.
- Solar & Green Energy: Advanced thin-film deposition for solar cells and BIPV (Building-Integrated Photovoltaics).
- Industrial & Automotive: Durable coatings for moulds and tools, automotive wheels, headlamps, and specialized ion nitriding processes.
- Consumer Goods: High-quality aesthetic and protective coatings for mobile phone cases.
Technical Specifications:
Input Supply Voltage | 195 to 250 Vac (43 .... 63 Hz), 1 phase operation* |
Input current | Max 8 A; Power factor = min 0.90 |
Mode of operation | DC and Unipolar PulseDC |
Frequency of operation | 10 kHz - 300 kHz |
Duty Cycle in operation | 2 - 99% ( 2 us min) |
Output Voltage | 0 – 1000 VDC negative (ignition voltage 1200V) |
Output Current | 0 – 3000 mA (1 mA step) |
Output Power | 1500 W max in DC and PulseDC mode |
Regulation type | Power, Current and Voltage |
Ripple noise | Switching: 2% p-p (50 kHz) Line: 1% p-p (100/120 Hz) |
Ramp timer | Programmable |
Communication | ModBus RTU/TCP |
Interface | RS232/485, Analog I/O**, Ethernet TCP** |
Methods of control | Local or remote through Communication Interface |
Arc Detection | < 2 us Response Time |
Dimensions | 483 x 395 x 88 mm (W x D x H) - 2U Rack Mounting Standard |
Weight | 10.8 kg |
I/O Control
Analog Interface | 25 Dsub male connector isolated (up to 2000 V RMS, 0 - 5V Analogue, 0/24 VDC Digital) |
Serial Communication Options | RS232 or RS485 with ModBUS EDF’s protocol ***; Ethernet IP, with ModBUS TSP EDF’s protocol |
*alternatively, operation is also possible from two hot wires 3 phase systems, providing the voltage between them which does not exceed more than 250 VAC; 110 VAC operation is possible as well, but with limited output power (1000 W)
** additional options
*** configurable with order