DC Series
The PPS DC Magnetron Power Supplies are versatile dual DC source power supplies for R&D coating & cleaning applications. It can control up to two sources which can be any combination of compact magnetron sputter heads or glow discharge heads. Sputter sources can be positioned on separate chambers even.
PPS500D-H | PPS500D-S | PPS1500D | PPS3000D | |
Output Power | 500.0 W | 500 W | 1500 W | 3000 W |
Output Voltage | 1000.0 V (1200V peak injection voltage) | 1000 V (1200V peak injection voltage) | 1000 V (1200V peak injection voltage) | 1000 V (1200V peak injection voltage) |
Output Current | 1000.0 mA | 1000mA | 3000 mA | 3000mA |
Communication Interface | Modbus RTU RS232 or RS485 Analog I/O, Modbus TCP EthernetIP* | Modbus RTU RS232 or RS485 Analog I/O, Modbus TCP EthernetIP* | Modbus RTU RS232 or RS485 Analog I/O, Modbus TCP EthernetIP* | Modbus RTU RS485, Analog I/O |
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