Thickness and rate bench top monitor

Thickness and rate bench top monitors


As alternative to PC based monitor, EDF offers rack mounted monitor. The QPM60 multi channel thin film monitor is used to measure rate and thickness in thin film deposition processes. The touch screen display allows for intuitive operation and provides time charts for detailed process control. 

QPM comes in 3 versions:

QPM60-2CQPM60-4CQPM60-6C
Dimensions [mm]520 x 286 x 550 – 2U standard520 x 286 x 550 – 2U standard520 x 286 x 550 – 2U standard
Weight1.6 kg1.6 kg1.6 kg
User Interface4.3” Colour TFT and rotary encoder4.3” Colour TFT and rotary encoder4.3” Colour TFT and rotary encoder
Communication interfaceRS232 and EthernetIP *RS232 and EthernetIP *RS232 and EthernetIP *
Inputs channels246
Resolution0.01 Hz **0.01 Hz **0.01 Hz **
Thickness resolution0.012 A ( density = 1)0.012 A ( density = 1)0.012 A ( density = 1)

* Ethernet for future firmware development

** each channel requires external oscillator model QM20-EO