NEBULA SERIES

The Henniker Plasma ‘NEBULA’ range of low pressure plasma treatment systems are standalone systems with large capacity chambers for treating larger format parts, or more parts in a single batch. They are suited to both regular industrial usage and also for development of new processes and surface chemistry. NEBULA plasma treatment systems have a large HMI interface and are controlled via an industrial PLC system. They allow user level access ranging from simple operator, able to execute programs only, to full administrator, able to create users, edit and test new recipes. Due to their flexibility and robustness, they are chosen where reliability and flexibility are paramount.

NEBULA-30

NEBULA-50

NEBULA-100

NEBULA-150

Enclosure Dimensions

W 612 x H 1875 x L 852 mm

W 612 x H 1875 x L 852 mm

W 612 x H 1875 x L 852 mm

W 612 x H 1875 x L 852 mm

Weight

100 kg

107 kg

113 kg

120 kg

Chamber Form

Rectangular

Rectangular

Rectangular

Rectangular

Chamber Dimensions

300 x 300 x 365H mm

300 x 300 x 560H mm

400 x 400 x 625H mm

400 x 600 x 625H mm

Plasma power

1000 W max

1000 W max

1000 W max

1000 W max

Plasma frequency

40 kHz

40 kHz

40 kHz

40 kHz