DC series
DC Power Supplies
The PPS DC Magnetron Power Supplies are versatile dual DC source power supplies for R&D coating & cleaning applications. It can control up to two sources which can be any combination of compact magnetron sputter heads or glow discharge heads. Sputter sources can be positioned on separate chambers even.
These systems come in 5 versions:
PPS 500D-H | PPS 500D-S | PPS 1000D | PPS 1500D | PPS 3000D | |
Output Power | 500 W | 500 W | 1000 W | 1500 W | 3000 W |
Output Voltage | 1000 V (1200 V peak injection voltage) | 1000 V (1200 V peak injection voltage) | 1000 V (1200 V peak injection voltage) | 1000 V (1200 V peak injection voltage) | 1000 V (1200 V peak injection voltage) |
Output Current | 1000 mA | 1000 mA | 2000 mA | 3000 mA | 3000 mA |
Communication | ModBus RTU/TCP | ModBus RTU/TCP | ModBus RTU/TCP | ModBus RTU/TCP | ModBus RTU/TCP |
Interface | RS232/485, Analog I/O*, Ethernet TCP* | RS232/485, Analog I/O*, Ethernet TCP* | RS232/485, Analog I/O*, Ethernet TCP* | RS232/485, Analog I/O*, Ethernet TCP* | RS232/485, Analog I/O*, Ethernet TCP* |
* additional options